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专利名称：Method of forming organic film, and organic
film, nozzle plate, inkjet head and electronicdevice
发明人：Hiroki Uchiyama申请号：US123948申请日：20100929公开号：US08475885B2公开日：20130702
专利附图：
摘要：The method of forming an organic film, includes: an organic film formation stepof forming an organic film on a surface of a base member using a silane coupling agent;and a post-processing step including a water vapor introduction step of holding the basemember on which the organic film has been formed in an atmosphere containing at leastwater vapor, and a dehydration processing step of holding the base member in anatmosphere having a smaller presence of water vapor than the atmosphere in the watervapor introduction step.
申请人：Hiroki Uchiyama
地址：Ashigarakami-gun JP
国籍：JP
代理机构：Fish & Richardson P.C.
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